Wafer Manufacturing Shaping of Single Crystal Silicon

佳木

This book is designed and written with both research and engineering practice in mind. Subjects pertaining to the fundamentals of wafer manufacturing and recent research advances are presented, as well as practical engineering and technology for practitioners in this industry. This book is ideal for a novice who wants to gain insightful information and knowledge about wafer manufacturing, and to learn how the prime (or premium) wafers that are used in microelectronics fabrication are pro- duced. At the same time, this book is full of research topics and presentations of advances in fundamental knowledge about relevant manufacturing processes such that it will meet the needs of curious minds who want to investigate issues beyond the status quo and to study these processes with an objective to improve a myriad of related manufacturing processes.
The book is a must-have for engineers and researchers in the field of wafer production and manufacturing. Although single crystalline silicon wafers are the majority of wafering done today in the industry, this book is also equally applicable, in many regards, to the wafer production of various crystal ingots such as III–V and II–VI compounds, silicon carbide, lithium niobates, and others.

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